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Nanoscale Transistors D-79111 Freiburg In many cases this isSilicon technology continues to progress, but device scaling is rapidly taking the metal oxide semiconductor field effect transistor (MOSFET) to its limit. When MOS technology was developed in the 1960's, channel lengths were about 10 micrometers, but researchers are now building transistors with channel lengths of less than 10 nanometers. New kinds of transistors and other devices are also being explored. Nanoscale MOSFET engineering continues,